193 nm 50% VA
for Ar+F-laser on FS
with AR 193 nm 0°
on the back.
T can be tuned in the range
90%...< 50% by changing the angle of incidence from 0° to 40°.
Reflected beam should be absorbed in a beam dump.
Fluoride coatings on CaF2 substrates have 2 J/cm2
|193 nm 50% VA